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ITO (Indium Tin Oxide) target refers to a compound target composed of tin, indium, and oxygen, which exhibits excellent electrical conductivity, transparency, and chemical stability.
The ITO (Indium Tin Oxide) target is primarily used in the following areas:
1. Display devices: LCD, PDP, OLED, etc.
2. Solar cells: ITO thin films enable better light penetration into solar cell components, improving the efficiency of power generation.
3. Touchscreens: ITO thin films exhibit excellent conductivity and transparency, making them commonly used as the conductive layer in touchscreen panels.
4. LED: ITO thin films can be used as transparent conductive layers in LED chips.
5. Radiation shielding glass, anti-fog and defrosting glass, solar glass, etc.
ITO targets are mainly categorized into planar targets and rotary targets.
Main Technical Specifications:
Product Name |
ITO Target |
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Composition |
In₂O₃:SnO₂(90:10±0.5wt),other ratios available upon customer request |
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Appearance |
Black or dark gray, in sheet or tubular form, or other shapes |
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Purity (%) |
≥99.99% |
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Relative Density (%) |
≥99.5% |
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Specifications (mm) |
Maximum size of planar target: 1200*300 mm Maximum size of cylindrical target: Φ136*Φ152*L400 mm |
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Resistivity (mΩ·cm) |
≤1.8×10⁻⁴Ω▪cm |
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Impurities not exceeding |
Fe |
Al |
Si |
Ni |
Cu |
Pb |
Cr |
Total |
|
PPM |
15 |
10 |
15 |
5 |
5 |
5 |
5 |
100 |
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