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High-quality optoelectronic materials/high-purity targets

Sputtering target

ITO target

ITO (Indium Tin Oxide) is a compound target composed of tin, indium and oxygen, which has excellent electrical conductivity, transparency and chemical stability.

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Product description

ITO (Indium Tin Oxide) target refers to a compound target composed of tin, indium, and oxygen, which exhibits excellent electrical conductivity, transparency, and chemical stability.

The ITO (Indium Tin Oxide) target is primarily used in the following areas:

1. Display devices: LCD, PDP, OLED, etc.

2. Solar cells: ITO thin films enable better light penetration into solar cell components, improving the efficiency of power generation.

3. Touchscreens: ITO thin films exhibit excellent conductivity and transparency, making them commonly used as the conductive layer in touchscreen panels.

4. LED: ITO thin films can be used as transparent conductive layers in LED chips.

5. Radiation shielding glass, anti-fog and defrosting glass, solar glass, etc.

ITO targets are mainly categorized into planar targets and rotary targets.

Main Technical Specifications:

Product Name	ITO Target
Composition	In₂O₃:SnO₂(90:10±0.5wt),other ratios available upon customer request
Appearance	Black or dark gray, in sheet or tubular form, or other shapes
Purity (%)	≥99.99%
Relative Density (%)	≥99.5%
Specifications (mm)	Maximum size of planar target: 1200300 mm Maximum size of cylindrical target: Φ136Φ152*L400 mm
Resistivity (mΩ·cm)	≤1.8×10⁻⁴Ω▪cm
Impurities not exceeding	Fe	Al	Si	Ni	Cu	Pb	Cr	Total
PPM	15	10	15	5	5	5	5	100