The maintenance of the infrared sputtering target cannot be ignored, because the cleanliness of the target plays a crucial role in the quality of the coating formed during the sputtering coating process and whether the product quality is qualified or not. It can reduce the nodules on the surface of the target material, and can also improve the utilization rate and production efficiency of the target material, and the cleaning of the target material is also inseparable from the later maintenance.

Infrared sputtering target maintenance

In order to avoid short circuits and arcing caused by unclean cavities during the sputtering process, it is necessary to remove the accumulated sputtering materials deposited in the middle and both sides of the sputtering tracks in stages. It is also beneficial for the user to sputter continuously at maximum power density.

Infrared sputtering target storage

Infrared sputtering target manufacturers recommend that users store the sputtered material (whether metal or ceramic) in a vacuum package. In particular, the bonding target must be stored under vacuum conditions to avoid oxidation of the adhesion layer and affect the bonding quality of the target. For the packaging of metal targets, we recommend at least a clean plastic bag.

Sputtering target cleaning

Step 1. Clean the sputtering target with a soft, lint-free cloth soaked in acetone;
Step 2, similar to the first step, clean the target with alcohol;
Step 3, rinse the target material with deionized water. After that, put the target in an oven and dry it at 100 degrees Celsius for 30 minutes;
Step 4. Flush the target with high pressure, low humidity argon to remove any impurities that could cause arcing in the sputtering system.
Short circuit and tightness check

After the target is installed, short-circuit inspection and sealing inspection of the entire cathode are required. It is recommended to shake the watch with an ohmmeter to determine whether the cathode is short-circuited. After it is determined that the cathode is not short-circuited, a water leakage inspection can be performed, and water is passed into the cathode to determine whether there is any leakage.

Packaging and Shipping

All targets are packaged in vacuum sealed plastic bags with moisture barrier. The outer packaging is generally a wooden box with anti-collision layers around it to protect the target and backboard from damage during transportation and storage.