High purity tungsten is a basic material for manufacturing integrated circuits. The shape of the material can be foil, sheet, target, filament, insulated wire, straight rod, round tube, powder, single crystal, etc. It is widely used as gate electrode material, wiring material and shielding metal material of semiconductor large-scale integrated circuits. The purity of high-purity tungsten reaches 99.999% and 99.9999%, denoted as 5N and 6N pure tungsten. Its content of various impurity elements should be between (0.1～1000)×10-12, and there are special requirements for the content of certain impurity elements, such as radioactive elements, alkali metal elements, heavy metal elements and gas elements.

The high purity tungsten and its silicide are used in super large-scale integrated circuits as resistance layers, diffusion barriers, etc., and as gate materials and connection materials in metal oxide semiconductor transistors. The determination of trace elements in high-purity tungsten is an important criterion for evaluating the performance of high-purity tungsten. Reducing the lower limit of the determination of trace elements and increasing the number of trace elements, improving the accuracy and sensitivity of the measurement are the main points of the high-purity tungsten detection process. Research direction. Commonly used methods for the detection of trace elements in high-purity metals include spectroscopy, mass spectroscopy, and neutron analysis. With the improvement of material purity, traditional spectroscopy and neutron analysis cannot meet the analysis requirements of 6N tungsten powder. However, mass spectroscopy has played an increasingly important role in the detection of trace impurities in high-purity tungsten. An increasingly important role.

The preparation process of high purity tungsten is tedious, and various purification methods have great differences in the effect of removing different impurities; in the domestic refining process of high purity tungsten, only simple vacuum degassing treatment is used to remove interstitial impurities. Purity is subject to certain restrictions. The smelting method has great advantages in purifying refractory metals due to the characteristics of high temperature, no pollution, and good purification effect; but its raw material purity requirements are high, the cost is high, and the process is time-consuming. Therefore, how to successfully prepare high-purity tungsten by organically combining various processes has become a research hotspot and difficulty.