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Various thin films can be produced by magnetron sputtering on Rhenium target substrate

Various thin films can be produced by magnetron sputtering on Rhenium target substrate

(Summary description)This paper describes the possibility of producing various thin films by magnetron sputtering on Rhenium target substrates.

Various thin films can be produced by magnetron sputtering on Rhenium target substrate

(Summary description)This paper describes the possibility of producing various thin films by magnetron sputtering on Rhenium target substrates.

Information

Various thin films can be produced by magnetron sputtering on Rhenium target substrate

(1) Functional film: such as film with absorption, transmission, reflection, refraction, polarization, etc.For example, silicon nitride antireflective coatings are deposited at low temperatures to improve the photoelectric conversion efficiency of solar cells.

(2) applications in the decoration field, such as all kinds of total reflective and translucent membranes, such as mobile phone housing, mouse, etc.

(3) As a non-thermal coating technology in the field of microelectronics, it is mainly used in chemical vapor deposition (CVD) or metalloorganic.

(4) Chemical vapor deposition (CVD) is difficult to grow and unsuitable for thin film deposition of materials. It can also obtain a large area of very uniform thin film due to the high uniformity and smoothness of rhenium target.

(5) In the optical field: Medium frequency closed-field unbalanced magnetron sputtering technology has also been applied to optical thin film (such as antireflective film), low radiation glass and transparent conductive glass.In particular, transparent conductive glass is widely used in flat panel display devices, solar cells, microwave and radio frequency shielding devices and devices, sensors and so on.Therefore, there is a high demand for high-quality rhenium targets.

(6) In the mechanical processing industry, surface functional membranes, super-hard membranes, and surface deposition technology of lubrication membranes have made considerable progress since their inception. They can effectively improve surface hardness, composite toughness, abrasion resistance and high temperature chemical stability, thereby greatly increasing the service life of coated products.

Magnetron sputtering has played an important role in the research of high temperature superconducting thin films, ferroelectric thin films, giant magnetoresistance thin films, thin film luminescent materials, solar cells, memory alloy thin films, as well as in the field of these applications.Magnetron sputtering can not be separated from materials based on rhenium target, especially the smooth and even rhenium target with high quality, which is a rare good product in the industry.

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